Ϊ½øÒ»²½ÔöÇ¿¾üÃñÐͬÁ¢Ò죬£¬£¬ÒÀÍоü¹¤ÆóÒµÈ˲𢡢ÊÖÒÕ¡¢¡¢×°±¸ÓÅÊÆ£¬£¬£¬ÍƽøÊÐÊô¹¤ÒµÆóÒµÓë¾ü¹¤µ¥Î»½¨ÉèÒÔ×ÊԴΪŦ´ø¡¢¡¢ÊÖÒÕΪ½¹µã¡¢¡¢ÆóҵΪÖ÷Ìå¡¢¡¢Êг¡Îªµ¼ÏòµÄÐͬÏàÖú»úÖÆ£¬£¬£¬Ôö½ø¿Æ¼¼Ð§¹ûת»¯£¬£¬£¬¼ÓËÙÍÆ½ø¾üÃñÈںϹ¤ÒµÏîÄ¿½¨É裬£¬£¬3ÔÂ20ÈÕÏÂÖ磬£¬£¬ÊÐί¾üÃñÈںϰìÖ÷ÈÎÕųڣ¬£¬£¬¼¯Íŵ³Î¯Êé¼Ç¡¢¡¢¶Ê³¤Ç¿Ê¢¸°Î÷°²Ë¼Î¢´«¸Ð¿Æ¼¼ÓÐÏÞ¹«Ë¾µ÷Ñн»Á÷¡£¡£¡£ÊÐί¾üÃñÈںϰ츱Ö÷ÈÎʩƼ¡¢¡¢¼¯Íʤ»áÖ÷ϯ¸ß±ó¡¢¡¢ÈËÁ¦×ÊÔ´×ܼàÎÄÑÇÄУ¬£¬£¬ÊÐί¾üÃñÈںϰìÃØÊé´¦¡¢¡¢Í³³ïе÷½â£¬£¬£¬ÊпƼ¼¾ÖЧ¹û´¦£¬£¬£¬¼¯Íž¼ÃÔËÐв¿¡¢¡¢É¹ļ¯ÍÅ¡¢¡¢Î÷ÎÞ¶þ¼¯ÍÅ¡¢¡¢Î÷ÒǼ¯ÍÅÓйØÈÏÕæÍ¬Ö¾Åãͬµ÷ÑС£¡£¡£
µ÷ÑÐ×éÒ»ÐÐÊ×ÏÈÂÃÐÐÁË˼΢¿Æ¼¼²úÆ·Õ¹Ê¾Çø£¬£¬£¬ÌýÈ¡ÁË˼΢¿Æ¼¼ÈÏÕæÈË¶ÔÆäÑз¢Ð§¹ûµÄÏêϸ½éÉÜ¡£¡£¡£×ù̸»áÉÏ£¬£¬£¬ÊÐί¾üÃñÈںϰ졢¡¢Ò¼¶¨·¢¼¯Íż°ÏÂÊôÆóÒµÏòµ¼Ó뺽¿Õ¹¤ÒµÎ÷°²º½ÐÐ×Ô¶¯¿ØÖÆÑо¿Ëù¡¢¡¢Ë¼Î¢¿Æ¼¼µÄÏòµ¼¼°ÊÖÒÕÍŶӾ;üÃñÈÚºÏÁìÓòµÄÏàÖú¾ÙÐÐÁËÉîÈë½»Á÷¡£¡£¡£¸÷·½¾ùÒÔΪ£¬£¬£¬¾üÃñÈÚºÏÊǹú¼ÒÕ½ÂÔÉú³¤µÄÖ÷ҪƫÏò£¬£¬£¬Ò²ÊÇÍÆ¶¯µØ·½¾¼ÃתÐÍÉý¼¶µÄÖ÷Ҫ;¾¶¡£¡£¡£
ÕųÚÌåÏÖ£¬£¬£¬½«¼ÌÐøÆð¾¢Ö§³Ö˼΢¿Æ¼¼Éú³¤£¬£¬£¬ÎªÆäÌṩÕþ²ßÖ¸µ¼¡¢¡¢×ʽð·ö³ÖµÈ·½Ãæ×ÊÖú¡£¡£¡£Í¬Ê±£¬£¬£¬Ò²Ï£Íû˼΢ÓëÒ¼¶¨·¢¼¯ÍŵÈÊÐÊôÆóÒµÔöÇ¿ÏàÖú£¬£¬£¬ÊµÏÖ×ÊÔ´¹²Ïí¡¢¡¢ÓÅÊÆ»¥²¹£¬£¬£¬Íƶ¯¹¤ÒµÏò¸ü¸ßÌõÀí¡¢¡¢¸ü¹ãÁìÓòÉú³¤¡£¡£¡£
ǿʢÌåÏÖ£¬£¬£¬´Ë´Îµ÷ÑÐΪҼ¶¨·¢¼¯ÍÅÓë˼΢¿Æ¼¼Ö®¼äµÄÏàÖúµÓÚ¨Á˸üÉîµÄ»ù´¡£¡£¡£¬£¬£¬Ò²Îª¾üÃñÈںϹ¤ÒµÌ½Ë÷³öеķ¾¶¡£¡£¡£ÒÔ´Ë´ÎѹÁ¦±äËÍÆ÷²úÆ·Ñз¢ÏîÄ¿ÏàÖúΪÆõ»ú£¬£¬£¬³ä·ÖÑéÕ¹Ò¼¶¨·¢ÔÚ¹¤ÒµÁ´ÕûºÏ¡¢¡¢×ÊÔ´ÔË×÷ÒÔ¼°É¹ļ¯ÍÅÊг¡¿ªÍØ¡¢¡¢¸ß¶ËÖÆÔìµÈ·½ÃæµÄÓÅÊÆ£¬£¬£¬Óë˼΢¿Æ¼¼¿ªÕ¹Éî¶ÈÏàÖú£¬£¬£¬ÖúÁ¦¾üÃñÈںϹ¤ÒµÊµÏÖ¿çԽʽÉú³¤¡£¡£¡£
¡¾Î÷°²Ë¼Î¢´«¸Ð¿Æ¼¼ÓÐÏÞ¹«Ë¾¡¿ÊÇÖк½Î÷°²º½ÐÐ×Ô¶¯¿ØÖÆÊÖÒÕÓÐÏÞ¹«Ë¾Í¶×ÊÉèÁ¢×¨×¢ÓÚ¾üÃñÈÚºÏÊÖÒÕÑз¢ÓëÓ¦ÓõĸßÐÂÊÖÒÕÆóÒµ¡£¡£¡£Ë¼Î¢¿Æ¼¼ÒÀÍÐ×Ô¿ØËùµÄMEMS¹¤ÒÕÖÆÔìÆ½Ì¨£¬£¬£¬ÒÔÖи߶ËѹÁ¦ÕÉÁ¿Îª³ö·¢µã£¬£¬£¬Ö¼ÔÚ´òÔìÒ»¼ÒÍêÈ«×ÔÖ÷¿É¿ØµÄÖи߶ËѹÁ¦Ð¾Æ¬¼°´«¸ÐÆ÷¼¶²úÆ·¹©Ó¦ÉÌ£¬£¬£¬½â¾ö½¹µãÁìÓò´«¸ÐÆ÷¼þµÄÐèÇóÎÊÌâ¡£¡£¡£¹«Ë¾ÓµÓÐÒ»Ö§ÒÔ²©Ê¿¡¢¡¢Ë¶Ê¿ÎªÖ÷ÌåµÄ¸ßˮƽÑз¢ÍŶӣ¬£¬£¬¾ß±¸´ÓоƬÉè¼Æ¡¢¡¢ÖÆ×÷¡¢¡¢·â×°µ½´«¸ÐÆ÷×°µ÷¡¢¡¢²âÊÔ¼°Ó¦Ó÷þÎñµÄÈ«Á÷³ÌÄÜÁ¦¡£¡£¡£ÏÖÔÚ¹«Ë¾ÐγÉѹÁ¦Ð¾Æ¬¡¢¡¢¸ß¾«¶È¹èгÕñѹÁ¦´«¸ÐÆ÷¡¢¡¢¸ßιèѹ×èѹÁ¦´«¸ÐÆ÷Èý´ó²úÆ·Æ×ϵ£¬£¬£¬ÐÔÄÜÖ¸±ê´¦ÓÚº£ÄÚÁìÏÈ¡¢¡¢¹ú¼ÊÏȽøË®Æ½£¬£¬£¬ÒÑÔÚº½¿Õ¡¢¡¢º½Ìì¡¢¡¢ÆøÏ󡢡¢µçÁ¦¡¢¡¢±ê×¼Æ÷¡¢¡¢¹ìµÀ½»Í¨µÈ¶à¸öÁìÓòÐγÉÓ¦Óᣡ£¡£